DF-760E

A unique analyser solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2 and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).

In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.

This exceptional measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.

Features:

  • Unique industry solution for ppt monitoring of moisture and O2
  • Operable via front panel or digital communication options
  • Broad Detection Range: 0-20ppm – 0-2ppb min (H20) / 0-20ppm – 0-1ppb min. (O2)
  • Dual analysis capability provides ‘one-box’ solution to H2O/O2 trace contaminant measurements
  • A single analyzer can be used for multiple background gases: N2, H2, He, Ar and O2

Klantenservice

Sebastian Kelderman
Sales
0031102938860